VAT 205860A High-Performance Vacuum Gate
- Product Code: 205860A
- Availability: In Stock
VAT 205860A
High-Performance Vacuum Gate Valve
Product Overview
The VAT 205860A is a high-performance vacuum gate valve designed for precision control and isolation in ultra-high vacuum (UHV) applications. This advanced valve provides reliable sealing and precise positioning, making it ideal for critical processes in semiconductor manufacturing, research facilities, and other high-tech industries where vacuum integrity is paramount.
Based on VAT's proven gate valve technology platform, the 205860A offers exceptional reliability and performance in demanding vacuum environments. Its robust design ensures long service life and minimal maintenance requirements, even in high-cycle applications. The valve features precise control mechanisms and advanced sealing technology to maintain optimal vacuum conditions.
This vacuum gate valve provides excellent conductance characteristics and minimal outgassing, making it suitable for applications requiring high vacuum levels and clean environments. With its compact design and versatile mounting options, the VAT 205860A can be easily integrated into various vacuum system configurations.
Technical Specifications
Basic Parameters
- Valve Type: Vacuum gate valve
- Nominal Bore: DN 63 (2.5 inches)
- Connection Type: ISO-KF, ISO-F, CF (optional)
- Operating Pressure: 10-11 to 1 bar
- Actuation: Pneumatic, electric (optional)
Performance Data
- Conductance: 120 l/s (N2, open position)
- Leak Rate: ≤1×10-9 mbar l/s (He)
- Outgassing Rate: ≤1×10-9 mbar l/s/cm²
- Operating Time: ≤0.5 seconds (open/close)
- Cycle Life: ≥1,000,000 operations
Actuation Specifications
- Air Supply: 4-6 bar (pneumatic version)
- Power Supply: 24 VDC, 110/230 VAC (electric version)
- Control Signal: 0-10 VDC, 4-20 mA (optional)
- Position Feedback: Reed switches, proximity sensors
- Manual Override: Available as option
Materials
- Body: Stainless steel 316L
- Gate: Stainless steel 316L
- Seals: Viton, Kalrez, PTFE (options)
- Bearing: PTFE, bronze
- Fasteners: Stainless steel 316
Environmental Parameters
- Operating Temperature: -20°C to +150°C
- Storage Temperature: -30°C to +180°C
- Humidity: 5% to 95% RH
- Ambient Pressure: 0.8 to 1.2 bar
- Vibration Resistance: 10-2000 Hz, 10 g RMS
Approvals and Certifications
- CE Marking: Pressure Equipment Directive
- ATEX: II 2GD c IIC T6 (optional)
- UL/CSA: Available (electric versions)
- RoHS: Compliant
- REACH: Compliant
Product Features
Ultra-High Vacuum Performance
Designed for ultra-high vacuum applications with excellent leak tightness and minimal outgassing. Achieves vacuum levels down to 10-11 mbar, making it suitable for critical processes requiring high vacuum integrity.
High-Speed Operation
Fast opening and closing times of ≤0.5 seconds for rapid process control and response. High cycle life of ≥1,000,000 operations ensures reliable performance in high-frequency applications.
Advanced Sealing Technology
Innovative sealing design provides exceptional leak tightness (≤1×10-9 mbar l/s He). Multiple seal material options including Viton, Kalrez, and PTFE to suit different application requirements and media compatibility.
Robust Construction
Durable stainless steel 316L body and gate for corrosion resistance and long service life. Precision-machined components ensure smooth operation and minimal wear, even in demanding environments.
Versatile Actuation Options
Available with pneumatic or electric actuation to suit different control requirements. Optional position feedback and control signals for integration with automated systems and process control.
Excellent Conductance
Optimized flow path design provides high conductance (120 l/s for N2) with minimal pressure drop. Smooth internal surfaces reduce particle trapping and facilitate effective cleaning procedures.
Flexible Mounting Options
Multiple connection types including ISO-KF, ISO-F, and CF flanges for easy integration into various vacuum systems. Compact design allows for installation in space-constrained environments.
Safety Features
Integrated safety features including position monitoring, overload protection, and emergency stop capabilities. Optional manual override for emergency operation during power failures or maintenance.
Applications
Semiconductor Manufacturing
Critical vacuum isolation in semiconductor fabrication processes including CVD, PVD, etching, and ion implantation. High vacuum performance and clean design meet the stringent requirements of semiconductor manufacturing.
Research and Development
Ultra-high vacuum applications in scientific research facilities, particle accelerators, and fusion research. Provides reliable vacuum isolation for experimental setups and research equipment.
Aerospace and Defense
Space simulation chambers, satellite testing facilities, and defense applications requiring high vacuum performance. Robust design ensures reliable operation in critical aerospace systems.
Pharmaceutical and Biotechnology
Vacuum processing in pharmaceutical manufacturing, freeze-drying equipment, and biotechnology applications. Clean design and material compatibility meet pharmaceutical industry standards.
Optical Coating
Vacuum coating systems for optical components, displays, and decorative coatings. High vacuum performance and minimal outgassing ensure coating quality and consistency.
Analytical Instruments
Mass spectrometers, electron microscopes, and other analytical equipment requiring high vacuum environments. Reliable performance and minimal background interference enhance measurement accuracy.
Energy Research
Fusion reactors, particle accelerators, and energy storage systems requiring ultra-high vacuum conditions. Robust construction and high reliability meet the demands of energy research applications.
Flat Panel Display Manufacturing
Vacuum processes in LCD, OLED, and other flat panel display manufacturing. High-speed operation and reliability support high-throughput production environments.
Technical Details
Valve Design
- Design Type: Parallel gate valve
- Sealing Principle: Face sealing
- Gate Movement: Linear vertical
- Guide System: Precision guide rails
- Balancing: Pressure-balanced design
Pneumatic Actuator
- Type: Double-acting cylinder
- Air Consumption: 0.2 l/cycle (at 6 bar)
- Port Size: 1/4" NPT or G1/4"
- Air Preparation: Filter, regulator, lubricator
- Control Valves: 5/2 or 5/3 way solenoid valves
Electric Actuator
- Motor Type: DC servo motor
- Power Rating: 100-200 W
- Control: Microprocessor-based controller
- Positioning Accuracy: ±0.1 mm
- Protection Class: IP65
Monitoring and Control
- Position Indicators: Visual position indicators
- Limit Switches: Reed switches or proximity sensors
- Feedback Options: Analog position feedback (0-10V, 4-20mA)
- Communication: Profibus, DeviceNet, Modbus (options)
- Diagnostics: Integrated diagnostic functions
Physical Dimensions
- Overall Length: 280 mm
- Width: 180 mm
- Height (without actuator): 150 mm
- Height (with pneumatic actuator): 320 mm
- Weight: 15 kg (pneumatic), 20 kg (electric)
Maintenance Features
- Service Intervals: 12-24 months (depending on usage)
- Lubrication: Lifetime lubricated bearings
- Seal Replacement: Field-replaceable seals
- Maintenance Access: Easy access to serviceable components
- Spare Parts: Comprehensive spare parts availability
Installation and Maintenance
Installation Guidelines
The VAT 205860A vacuum gate valve should be installed by qualified personnel following VAT's installation instructions. Proper handling, cleaning, and installation procedures are critical to maintain the valve's ultra-high vacuum performance. The valve should be mounted in a horizontal position with the actuator above the valve body.
Key installation considerations include: proper flange alignment and torque values; appropriate vacuum-compatible gaskets; clean handling to prevent contamination; and proper electrical or pneumatic connections. The valve should be baked out according to application requirements to achieve optimal vacuum performance.
Ordering Information
Model Description
Complete Model Number: 205860A
Product Series: 205 Series
Nominal Bore: DN 63 (2.5 inches)
Connection Type: ISO-KF (standard), ISO-F, CF (options)
Actuation: Pneumatic (standard), Electric (option)
Optional configurations: Special seal materials, manual override, position feedback, communication interfaces, special coatings, heating jackets, and customized control systems.
VAT Group
Vacuum Valves and Solutions
Document Number: 205860A-DOC
Revision Date: 2025